프로브 테스트 솔루션
표준 사양
XY축: 공기 완충 장치(Air suspension) 및 저울(Scale) 장착
Z 축
T 축
- Stage travel: 210 (x) x 300 (Y) mm
- Control resolution ability: 0.5 μm
- Scale resolution ability: 0.1 μm (옵션)
- Repeatability: within ±0.5 μm
- Accuracy: within ±20 μm
- Moving speed: Max. 50 mm/sec.
Z 축
- Stage travel: 210 (x) x 300 (Y) mm
- Resolution ability: 1 μm
- Repeatability: within ±3 μm
- Moving speed: Max. 25 mm/sec.
T 축
- Stage travel: 3 degree
- Resolution ability: 0.001 degree
- Rolling speed: Max. 1 degree/sec.
Leak Data
▶ Probe Leak
▶ Chuck Leak
High Current Probe
＊ Enables to use with manipulator as well as probe card.
＊ Enables to place many probes as its thin dimension, and it is corresponding to high current by split flow current.
＊ Enables to place many probes as its thin dimension, and it is corresponding to high current by split flow current.
▶ Low contact resistance material probe
It is able to apply high current with small probe tip, so you can do high current measurement for small PAD!
▶ Reference data
Low contact resistance material probe
| Probe tip dimension | Current level（DC） |
| 25um | 2A |
| 50um | - |
| 100um | - |
| 150um | - |
Ultra Low contact resistance material probe
| Probe tip dimension | Current level（DC） |
| 25um | 8A |
| 50um | 9A |
| 100um | 12A |
| 150um | 13A |
Hot chuck contact resistance
Test result of High Voltage & High Current
▶ High Voltage
Tested : 10KV voltage supply
▶ High Current
Tested：200A supply at Probe－Gold Plate－Chuck
▶ TEST RESULT
▶ TEST RESULT
High Voltage Protection (Spark)
High Current Probe card
▶ 200A pulsed Probe card at 300℃
We used
1, Ceramics PCB for high temperature
2, Ceramics blade for high temperature and high insulator
3, Iridium probe for high current
Special 2000A Probe card
▶ Fig１. Spring pin
▶ Fig2. Picture
▶ Specification of Spring pin
| Item | Spec. |
| Temperature | 350℃ |
| Current | 5～7A(DC) |
| Resistance | Smaller than50mΩ |
| Stroke | 1.0mm |
| Spring pressure | 11g |
▶ TEST report from customer
| Item | Condition | Result |
| Switching test | 300V／40A | OK |
| Avalanche breakdown | 1.3kV | OK |
| Break down test | 800V／230A(Pulse) | OK |
| Probe contact | ― | Good |
| Probe position | ― | It was able to find by camera of the prober |
| Inductance value |
― | Ls=77nH(Very low) Lc=Very low 5kV／nsec ( good through late) |
Safety Protection
▶ For Manual probe station
▶ For Semi Auto probe station
Safety specification
Shielding box for Manual prober and Semi-Auto having the gate switches.
Also, those signals are connected with tester .
When open the door, The tester's signal source will be shut down.
Shielding box for Manual prober and Semi-Auto having the gate switches.
Also, those signals are connected with tester .
When open the door, The tester's signal source will be shut down.
사업자등록번호 : 220-86-72761대표이사 : 신동만대표전화 : 070-7872-0701팩스 : 02-2167-3801
(우)07299 서울특별시 영등포구 경인로 775 (문래동 3가, 에이스하이테크시티 3동 2층)
(우)07299 서울특별시 영등포구 경인로 775 (문래동 3가, 에이스하이테크시티 3동 2층)